The Mott GSMR Series surface mount flow restrictors support the 1.125” high-flow C-Seal configuration gas systems. These restrictors are assembled and tested in a Class 100 clean room environment, and are mounted between the substrate and another two-port surface mount component.
The Mott VCR® fitting gas flow restrictor provides a compact, long-lasting flow control which can withstand sustained temperatures to 450°C (inert gas) and pressures to 120 psig. Mott can supply restrictors that withstand pressures up to 1500 psig by request.
As always, custom materials, porosity and hardware configurations are available upon request.
Typical Applications
Point-of-Use Filters are used in gas sticks for:
- Safety devices for semiconductor lines
- Flow setting device for gas processes
Product Specs
Operating Conditions
Surface Mount Restrictors
- Maximum Operating Temperature for Inert Gas: 460°C
- Maximum Operating Pressure: 1,200 psig
- Maximum Differential Pressure: 1,200 psid
- Burst Pressure: 20,000 psig
- Std Downstream Flow Rates: From 50 slpm (higher flows available)
- Flow tolerance: +/- 7% of rated flow at rated pressure (+/- 2% available upon request)
VCR Restrictors
- Maximum Operating Temperature for Inert Gas: 460°C
- Maximum Operating Pressure: 1,500 psig
- Maximum Differential Pressure: 1,500 psid
- Burst Pressure: 7,000 psig
- Std Downstream Flow Rates: From 50 slpm (higher flows available)
- Flow tolerance: +/- 7% of rated flow at rated pressure (+/- 2% available upon request)
Materials
- Housing: 316L SS
- Filter Medium: 316L SS
- Wetted Hardware Surface Finish: 10 Ra
- Nickel, Hastelloy®, and other materials available contact us
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