Mott GasShield® Surface Mount Filters offer top-of-the-line 0.0015 μm filtration capabilities in integrated gas systems employed in semiconductor OEM tools. These GasShield® Surface Mount Filters are designed to fit seamlessly into the 1.125” and 1.5” four-fastener, surface-mount gas distribution systems, featuring both C-seal and W-seal configurations. They are compatible with a wide range of inert gases as well as most specialty gases.
Product Specs
Operating Conditions
- Maximum Operating Pressure: 1800 psig (124.1 barg)
- Maximum Operating Temperature for Inert Gas: 460°C
- Maximum Differential Pressure: 500 psid (34.4 bar)
Materials
- Hardware: 316LSS or Alloy 22*
- Filter Medium: Penta® Nickel, 316L SS or Alloy 22*
- Wetted Hardware Surface Finish: 5 Ra
- Custom materials also available
- *Alloy 22 or UNS N06022 is a nickel-chromium-molybdenum super-alloy commonly referred to as Hastelloy® C-22®
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