Providing mass flow rate, total mass and temperature with accuracy ±1% of reading, the CPFM-8800 Series Mass Coriolis Flow Meter by Malema offers a line of highly accurate flow meter solutions designed for use in semiconductor and other high-purity industrial applications.
CPFM-8800 Flow Meters are comprised of two assemblies: one containing the sensor and the other containing the supporting electronics, allowing for remote sensor electronics. The sensor is fabricated exclusively from PFA (Perfluoroalkoxy) polymeric material, which provides all PFA-wetted surfaces to meet application requirements.
With patented Coriolis flow meter technology, the CPFM-8800 Flow Meter offers superior performance in all operating conditions. This Malema Coriolis Flow Meter is used in a wide variety of high-purity semiconductor applications, including DI water, harsh chemicals, and CMP polishing slurries.
Designed with either 1/4” or 3/8” port sizes, the CPFM-8800 Coriolis Flow Meter has two models with flow rate ranges of 50 to 1,500 grams per minute and 150 to 4,000 grams per minute, respectively. These flow rates can be achieved within 1% accuracy of the set point.
Key Features
- Fluid measurement performance is independent of fluid properties; eliminating the need to calibrate on different fluids
- Accuracy unaffected by flow regime (e.g., laminar or turbulent flow) or variations in flow velocity profile
- Sensors operate and measure in two-phase flow conditions with gas volumetric void fractions in excess of 30%
- Controls flow rate to within ±1% of reading, ideal for fluid blending and/or dispense applications and reduces chemical consumption
- All Perfluoroalkoxy (PFA) wetted part construction – ensures compatibility with UHP liquid chemicals, and DI water
- Patented Coriolis technology, offering the only plastic Coriolis flow controller in the market
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